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Non-destructive spectral analysis of AlxGa1-xN films by synchrotron soft X-ray photoelectron spectromicroscopy

TAKEZAWA, Shingo, 小濱 路生, Zhang Wenxiong, Hirokazu Fukidome, 渡邊 一世, IMURA, Masataka, TSUDA, Shunsuke, 小嗣 真人, NAGAMURA, Naoka.
THE 22ND INTERNATIONAL VACUUM CONGRESS（IVC-22）. 2022.

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Materials Data Repository (MDR)上の本文・データセット

    作成時刻: 2023-01-17 03:34:02 +0900更新時刻: 2023-01-17 03:34:02 +0900

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