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Non-destructive spectral analysis of AlxGa1-xN films by synchrotron soft X-ray photoelectron spectromicroscopy

TAKEZAWA, Shingo, 小濱 路生, Zhang Wenxiong, Hirokazu Fukidome, 渡邊 一世, IMURA, Masataka, TSUDA, Shunsuke, 小嗣 真人, NAGAMURA, Naoka.
THE 22ND INTERNATIONAL VACUUM CONGRESS(IVC-22). September 11, 2022-September 16, 2022.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2023-01-17 03:34:02 +0900Updated at: 2023-01-17 03:34:02 +0900

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