Development of Atomic Layer Deposition Technique of AlxGa1-xN for Hydrogen-terminated diamond MIS-FETs
The 8th Asian Conference on Crystal Growth and Crystal Technology. 2021.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2021-09-28 22:44:09 +0900更新時刻: 2021-09-28 22:44:09 +0900