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Development of Atomic Layer Deposition Technique of AlxGa1-xN for Hydrogen-terminated diamond MIS-FETs

The 8th Asian Conference on Crystal Growth and Crystal Technology. March 01, 2021-March 03, 2021.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2021-09-28 22:44:09 +0900 Updated at: 2021-09-28 22:44:09 +0900

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