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Low Temperature Growth of GaN film by Near-Atmospheric Plasma-Assisted Chemical Vapor Deposition

長田 貴弘, 佐久間 芳樹, 安西純一郎, 功刀俊介, 上原剛, 知京 豊裕.
the 7th International Conference of Nitride Semiconductors. September 16, 2007-September 21, 2007.

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    Created at: 2017-01-08 03:21:52 +0900Updated at: 2017-07-10 19:58:48 +0900

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