HOME > Presentation > DetailLow Temperature Growth of GaN film by Near-Atmospheric Plasma-Assisted Chemical Vapor Deposition長田 貴弘, 佐久間 芳樹, 安西純一郎, 功刀俊介, 上原剛, 知京 豊裕. the 7th International Conference of Nitride Semiconductors. September 16, 2007-September 21, 2007.NIMS author(s)NAGATA, TakahiroSAKUMA, YoshikiCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 03:21:52 +0900Updated at: 2017-07-10 19:58:48 +0900