HOME > Presentation > DetailCross-sectional CL observation for Oxynitride phosphorsジョ ユージン, 高橋 向星, 武田 隆史, 解 栄軍, 廣崎 尚登, 関口 隆史. Beam Injection Assessment of Microstructure in Semiconductor . 2016.NIMS author(s)CHO, YujinTAKAHASHI, KohseiTAKEDA, TakashiHIROSAKI, NaotoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 11:36:30 +0900Updated at: 2017-07-10 22:31:15 +0900