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Air damping effect on the quality factor of single-crystal diamond MEMS resonators
(単結晶ダイヤモンドMEMS共振子のエアダンピング研究)
第83回応用物理学会秋季学術講演会. September 20, 2022-September 23, 2022.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-29 03:20:19 +0900 Updated at: 2022-09-29 03:20:19 +0900