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AuthorKAGOYAMA Yohei, OKAMOTO Mitsuo, YOSHIOKA Hironori, HARADA Shinsuke, YAMASAKI, Takahiro, OHNO, Takahisa, UMEDA Takahide.
TitleC面ドライ酸化4H-SiC MOSFETにおける界面炭素関連欠陥の面内分布解析
(An analysis of in-plane defect distribution of carbon-related defects in dry-oxide C-face 4H-SiC MOSFET)
Event name第64回応用物理学会春季学術講演会
Year of publication2017

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