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| Author | KAGOYAMA Yohei, OKAMOTO Mitsuo, YOSHIOKA Hironori, HARADA Shinsuke, YAMASAKI, Takahiro, OHNO, Takahisa, UMEDA Takahide. |
|---|---|
| Title | C面ドライ酸化4H-SiC MOSFETにおける界面炭素関連欠陥の面内分布解析 (An analysis of in-plane defect distribution of carbon-related defects in dry-oxide C-face 4H-SiC MOSFET) |
| Event name | 第64回応用物理学会春季学術講演会 |
| Year of publication | 2017 |
| Language | Japanese |