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Microscopic Effect of Nitrogen Doping on Dielectric Constant of Hf-silicate

MOMIDA, Hiroyoshi, Tomoyuki Hamada, Takenori Yamamoto, Tsuyoshi Uda, UMEZAWA, Naoto, Kenji Shiraishi, CHIKYOW, Toyohiro, OHNO, Takahisa.
2005 Int. Conf. on Solid State Devices and Materials (SSDM2005). 2005.

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    Created at: 2017-02-25 01:06:47 +0900Updated at: 2017-07-10 19:31:08 +0900

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