(Integration of piezoelectric Pb(Zr0.52Ti0.48)O3 on single crystal diamond for MEMS pressure sensor )
The 4th International Conference on New Diamond and Nano Carbon . 2010.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-14 10:59:55 +0900更新時刻: 2017-07-10 20:47:58 +0900