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Smart-cut-assisted fabrication of ultrathin diamond NEMS cantilevers

CHEN, Guo, ZHAO, Wen, ZHANG, Zhaozong, KOIZUMI, Satoshi, LIAO, Meiyong.

36th International Conference on Diamond and Carbon Materials (ICDCM 2026). August 30, 2026-September 03, 2026.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Smart-cut-assisted fabrication of ultrathin diamond NEMS cantilevers

Created at: 2026-10-14 04:52:25 +0900 Updated at: 2026-10-14 04:52:25 +0900

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