HOME > Published patent applications > Detail[Published patent application] 半導体装置および半導体装置の製造方法2020-02-06. 2020021828 (Google Patents) , 7162833NIMS author(s)KIMOTO, KojiMITSUISHI, KazutakaNABATAME, ToshihideIROKAWA, YoshihiroCreated at :2023-07-22 21:46:01 +0900 Updated at :2023-07-22 21:46:01 +0900