HOME > Published patent applications > Detail[Published patent application] ε-Ga2O3単結晶、ε-Ga2O3の製造方法、および、それを用いた半導体素子2017-01-12. 2017007871 (Google Patents) , 6436538NIMS author(s)SHIMAMURA, KiyoshiVILLORA, GarciaOSHIMA, YuichiCreated at :2023-07-22 21:45:50 +0900 Updated at :2023-07-22 21:45:50 +0900