HOME > Published patent applications > Detail[Published patent application] 半導体装置、半導体装置の使用方法およびその半導体装置の製造方法2020-01-16. 2020009884 (Google Patents) NIMS author(s)IKEDA, NaokiOHI, AkihikoNABATAME, ToshihideCreated at :2023-07-22 21:46:01 +0900 Updated at :2023-07-22 21:46:01 +0900