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Concurrent synthesis and boron-doping of amorphous carbon films by focused ion beam-assisted chemical vapor deposition

著者Ryo Matsumoto, El Hadi S. Sadki, Hiromi Tanaka, Sayaka Yamamoto, Shintaro Adachi, Adnan Younis, Hiroyuki Takeya, Yoshihiko Takano.
掲載誌名Thin Solid Films 730 138704
出版社Elsevier BV
発表年2021
言語English
DOIhttps://doi.org/10.1016/j.tsf.2021.138704
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