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Concurrent synthesis and boron-doping of amorphous carbon films by focused ion beam-assisted chemical vapor deposition

Ryo Matsumoto, El Hadi S. Sadki, Hiromi Tanaka, Sayaka Yamamoto, Shintaro Adachi, Adnan Younis, Hiroyuki Takeya, Yoshihiko Takano.
Thin Solid Films 730 138704. 2021.

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    作成時刻: 2021-06-05 03:00:20 +0900更新時刻: 2024-06-02 06:38:03 +0900

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