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Concurrent synthesis and boron-doping of amorphous carbon films by focused ion beam-assisted chemical vapor deposition

Ryo Matsumoto, El Hadi S. Sadki, Hiromi Tanaka, Sayaka Yamamoto, Shintaro Adachi, Adnan Younis, Hiroyuki Takeya, Yoshihiko Takano.
Thin Solid Films 730 138704. 2021.
https://doi.org/10.1016/j.tsf.2021.138704

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