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Electrical and structural properties of TiO2−δthin film with oxygen vacancies prepared by RF magnetron sputtering using oxygen radical

著者Kinya Kawamura, Naoya Suzuki, Takashi Tsuchiya, Yuichi Shimazu, Makoto Minohara, Masaki Kobayashi, Koji Horiba, Hiroshi Kumigashira, Tohru Higuchi.
掲載誌名Japanese Journal of Applied Physics 55 [6S1] 06GJ08
ISSN: 13474065, 00214922
ESIでのカテゴリ: PHYSICS
出版社Japan Society of Applied Physics
発表年2016
言語English
DOIhttps://doi.org/10.7567/jjap.55.06gj08
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