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著者名Yukari Ishikawa, Yong-Zhao Yao, Yoshihiro Sugawara, Koji Sato, Yoshihiro Okamoto, Noritaka Hayashi, Benjamin Dierre, Kentaro Watanabe, Takashi Sekiguchi.
タイトルComparison of slicing-induced damage in hexagonal SiC by wire sawing with loose abrasive, wire sawing with fixed abrasive, and electric discharge machining
掲載誌名Japanese Journal of Applied Physics 53 7 071301
ISSN: 13474065 00214922
発表年2014
言語English
DOI10.7567/jjap.53.071301
ESIでのカテゴリPHYSICS
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