Comparison of slicing-induced damage in hexagonal SiC by wire sawing with loose abrasive, wire sawing with fixed abrasive, and electric discharge machining
(六方晶SiCのスライスによるダメージの比較)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at :2016-05-24 17:14:29 +0900 Updated at :2020-11-16 22:50:54 +0900