Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles
(Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles)
| 著者 | Chen Chen, Li He, Chengxin Jiang, Lingxiu Chen, Hui Shan Wang, Xiujun Wang, Ziqiang Kong, Xiaojing Mu, Zhipeng Wei, Kenji Watanabe, Takashi Taniguchi, Tianru Wu, Daoli Zhang, Haomin Wang. |
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| 掲載誌名 | 2D Materials 9 [2] 025015 ISSN: 20531583 ESIでのカテゴリ: MATERIALS SCIENCE |
| 出版社 | IOP Publishing |
| 発表年 | 2022 |
| 言語 | English |
| DOI | https://doi.org/10.1088/2053-1583/ac5461 |
| この文献をMendeleyにインポート |  |