Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles

Chen Chen; Li He; Chengxin Jiang; Lingxiu Chen; Hui Shan Wang; Xiujun Wang; Ziqiang Kong; Xiaojing Mu; Zhipeng Wei; Kenji Watanabe; Takashi Taniguchi; Tianru Wu; Daoli Zhang; Haomin Wang

doi:10.1088/2053-1583/ac5461

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Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles
(Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles)

Chen Chen, Li He, Chengxin Jiang, Lingxiu Chen, Hui Shan Wang, Xiujun Wang, Ziqiang Kong, Xiaojing Mu, Zhipeng Wei, Kenji Watanabe, Takashi Taniguchi, Tianru Wu, Daoli Zhang, Haomin Wang.

2D Materials 9 [2] 025015. 2022.

https://doi.org/10.1088/2053-1583/ac5461

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2022-04-19 03:25:04 +0900更新時刻: 2024-04-02 05:14:54 +0900

Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles(Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles
(Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles)