Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles

Chen Chen; Li He; Chengxin Jiang; Lingxiu Chen; Hui Shan Wang; Xiujun Wang; Ziqiang Kong; Xiaojing Mu; Zhipeng Wei; Kenji Watanabe; Takashi Taniguchi; Tianru Wu; Daoli Zhang; Haomin Wang; Chen Chen; Li He; Chengxin Jiang; Lingxiu Chen; Hui Shan Wang; Xiujun Wang; Ziqiang Kong; Xiaojing Mu; Zhipeng Wei; Kenji Watanabe; Takashi Taniguchi; Tianru Wu; Daoli Zhang; Haomin Wang

doi:10.1088/2053-1583/ac5461

Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles
(Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles)

Chen Chen, Li He, Chengxin Jiang, Lingxiu Chen, Hui Shan Wang, Xiujun Wang, Ziqiang Kong, Xiaojing Mu, Zhipeng Wei, Kenji Watanabe, Takashi Taniguchi, Tianru Wu, Daoli Zhang, Haomin Wang.

2D Materials 9 [2] 025015. 2022.

https://doi.org/10.1088/2053-1583/ac5461

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-04-19 03:25:04 +0900Updated at: 2024-04-02 05:14:54 +0900

Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles(Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles
(Directional Etching for High Aspect Ratio Nano-trenches in Hexagonal Boron Nitride by Catalytic Metal Particles)