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Realization of closed-loop optimization of epitaxial titanium nitride thin-film growth via machine learning

I. Ohkubo, Z. Hou, J.N. Lee, T. Aizawa, M. Lippmaa, T. Chikyow, K. Tsuda, T. Mori.
Materials Today Physics 16 100296. 2021.
Open Access Elsevier BV (Publisher)


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    作成時刻: 2020-11-18 03:00:13 +0900更新時刻: 2024-03-31 00:06:31 +0900