HOME > 論文 > 書誌詳細Development of a flux-film-coated sputtering (FFC-sputtering) method for fabricating c-axis oriented AlN filmY. Song, F. Kawamura, K. Shimamura, T. Ohgaki, N. Ohashi. AIP Advances 10 [11] 115011. 2020.https://doi.org/10.1063/5.0025736 Open Access AIP Publishing (Publisher) NIMS著者川村 史朗島村 清史大垣 武大橋 直樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2020-12-26 03:00:23 +0900更新時刻: 2024-03-31 01:43:22 +0900