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Development of a flux-film-coated sputtering (FFC-sputtering) method for fabricating c-axis oriented AlN film

Y. Song, F. Kawamura, K. Shimamura, T. Ohgaki, N. Ohashi.
AIP Advances 10 [11] 115011. 2020.
https://doi.org/10.1063/5.0025736
Open Access AIP Publishing (Publisher)

NIMS author(s)

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