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Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
( Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures)

Jangyup Son, Jong-Young Lee, Junyoung Kwon, SunPhil Kim, Yinchuan Lv, Jaehyung Yu, Huije Ryu, WATANABE, Kenji, TANIGUCHI, Takashi, Rita Garrido-Menacho, Nadya Mason, Elif Ertekin, Pinshane Y. Huang, Gwan-Hyoung Lee, Arend van der Zande.
NATURE COMMUNICATIONS 9 . 2018.

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    作成時刻: 2019-03-04 09:36:03 +0900更新時刻: 2021-03-10 00:53:27 +0900

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