Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures

Jangyup Son; Jong-Young Lee; Junyoung Kwon; SunPhil Kim; Yinchuan Lv; Jaehyung Yu; Huije Ryu; 渡邊 賢司; 谷口尚; Rita Garrido-Menacho; Nadya Mason; Elif Ertekin; Pinshane Y. Huang; Gwan-Hyoung Lee; Arend van der Zande; Jangyup Son; Jong-Young Lee; Junyoung Kwon; SunPhil Kim; Yinchuan Lv; Jaehyung Yu; Huije Ryu; 渡邊 賢司; 谷口尚; Rita Garrido-Menacho; Nadya Mason; Elif Ertekin; Pinshane Y. Huang; Gwan-Hyoung Lee; Arend van der Zande

Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
( Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures)

Jangyup Son, Jong-Young Lee, Junyoung Kwon, SunPhil Kim, Yinchuan Lv, Jaehyung Yu, Huije Ryu, WATANABE, Kenji, TANIGUCHI, Takashi, Rita Garrido-Menacho, Nadya Mason, Elif Ertekin, Pinshane Y. Huang, Gwan-Hyoung Lee, Arend van der Zande.

NATURE COMMUNICATIONS 9 . 2018.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2019-03-04 09:36:03 +0900Updated at: 2021-03-10 00:53:27 +0900

Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures( Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
( Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures)