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Fabrication of Highly Metallic TiN Films by Pulsed Laser Deposition Method for Plasmonic Applications

著者Ramu Pasupathi Sugavaneshwar, Satoshi Ishii, Thang Duy Dao, Akihiko Ohi, Toshihide Nabatame, Tadaaki Nagao.
掲載誌名ACS Photonics 5 [3] 814-819
ISSN: 23304022
ESIでのカテゴリ: PHYSICS
出版社American Chemical Society (ACS)
発表年2018
言語English
DOIhttps://doi.org/10.1021/acsphotonics.7b00942
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