HOME > Article > DetailOptical properties of single-crystal diamond MEMS: mitigating substrate interferenceKeyun Gu, Zilong Zhang, Zhaozong Zhang, Jian Huang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Functional Diamond 5 [1] 2570362. 2025.https://doi.org/10.1080/26941112.2025.2570362 Open Access Informa UK Limited (Publisher) Materials Data Repository (MDR) NIMS author(s)ZHANG, ZhaozongKOIZUMI, SatoshiLIAO, MeiyongFulltext and dataset(s) on Materials Data Repository (MDR)MDRavailable Optical properties of single-crystal diamond MEMS: mitigating substrate interference Created at: 2025-10-28 03:09:29 +0900 Updated at: 2026-09-09 04:32:08 +0900