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Relationship between electrical properties and interface structures of SiO2/4H-SiC prepared by dry and wet oxidation

Efi Dwi Indari, Yoshiyuki Yamashita, Ryu Hasunuma, Hiroshi Oji, Kikuo Yamabe.
AIP Advances 9 [10] 105018. 2019.
Open Access AIP Publishing (Publisher)

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    作成時刻: 2019-10-16 03:00:16 +0900 更新時刻: 2026-10-30 05:46:49 +0900

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