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AuthorEfi Dwi Indari, Yoshiyuki Yamashita, Ryu Hasunuma, Hiroshi Oji, Kikuo Yamabe.
TitleRelationship between electrical properties and interface structures of SiO2/4H-SiC prepared by dry and wet oxidation
Journal titleAIP Advances 9 [10] 105018
ISSN: 21583226
Year of publication2019
LanguageEnglish
DOI10.1063/1.5126050
ESI category
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