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Amorphous In-Si-O Films Fabricated via Solution Processing

著者Hani Esmael Jan, Ha Hoang, Tsubasa Nakamura, Tomoaki Koga, Toshiaki Ina, Tomoya Uruga, Takio Kizu, Kazuhito Tsukagoshi, Toshihide Nabatame, Akihiko Fujiwara.
掲載誌名Journal of Electronic Materials 46 [6] 3610-3614
ISSN: 03615235
ESIでのカテゴリ: MATERIALS SCIENCE
出版社Springer Nature
発表年2017
言語English
DOIhttps://doi.org/10.1007/s11664-017-5506-9
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