HOME > 論文 > 書誌詳細Wake-up-free properties and high fatigue resistance of HfxZr1−xO2-based metal–ferroelectric–semiconductor using top ZrO2 nucleation layer at low thermal budget (300 °C)Takashi Onaya, Toshihide Nabatame, Mari Inoue, Tomomi Sawada, Hiroyuki Ota, Yukinori Morita. APL Materials 10 [5] 051110. 2022.https://doi.org/10.1063/5.0091661 Open Access AIP Publishing (Publisher) NIMS著者生田目 俊秀Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-05-27 03:12:10 +0900更新時刻: 2024-05-01 08:20:05 +0900