Toward Low-Thermal-Budget Hafnia-Based Ferroelectrics via Atomic Layer Deposition
Jin-Hyun Kim, Takashi Onaya, Hye Ryeon Park, Yong Chan Jung, Dan N. Le, Minjong Lee, Heber Hernandez-Arriaga, Yugang Zhang, Esther H. R. Tsai, Chang-Yong Nam, Toshihide Nabatame, Si Joon Kim, Jiyoung Kim.
