Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source

Kazumasa Ishida, Nobuhiko Ozaki, Hirotaka Ohsato, Eiichiro Watanabe, Naoki Ikeda, Yoshimasa Sugimoto.

Japanese Journal of Applied Physics 57 [8S2] 08PE03. 2018.

https://doi.org/10.7567/jjap.57.08pe03

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作成時刻: 2018-07-19 15:30:33 +0900 更新時刻: 2026-10-01 05:57:18 +0900

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