HOME > 論文 > 書誌詳細Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light sourceKazumasa Ishida, Nobuhiko Ozaki, Hirotaka Ohsato, Eiichiro Watanabe, Naoki Ikeda, Yoshimasa Sugimoto. Japanese Journal of Applied Physics 57 [8S2] 08PE03. 2018.https://doi.org/10.7567/jjap.57.08pe03 NIMS著者渡辺 英一郎池田 直樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2018-07-19 15:30:33 +0900更新時刻: 2024-04-01 21:16:49 +0900