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Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source

Kazumasa Ishida, Nobuhiko Ozaki, Hirotaka Ohsato, Eiichiro Watanabe, Naoki Ikeda, Yoshimasa Sugimoto.
Japanese Journal of Applied Physics 57 [8S2] 08PE03. 2018.
https://doi.org/10.7567/jjap.57.08pe03

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