Formation of Free Hydrogen Gas By Annealing ALD-Al<sub>2</sub>O<sub>3</sub>/Si Stacked Structure | SAMURAI, NIMS Researchers Directory Service

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Formation of Free Hydrogen Gas By Annealing ALD-Al₂O₃/Si Stacked Structure

Ryo Matsumura, Naoki Fukata.

ECS Transactions 108 [5] 57-61. 2022.

https://doi.org/10.1149/10805.0057ecst

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-10-22 03:11:06 +0900 Updated at: 2026-10-08 06:58:06 +0900

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