HOME > 論文 > 書誌詳細Formation of Free Hydrogen Gas By Annealing ALD-Al2O3/Si Stacked StructureRyo Matsumura, Naoki Fukata. ECS Transactions 108 [5] 57-61. 2022.https://doi.org/10.1149/10805.0057ecst NIMS著者松村 亮深田 直樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-10-22 03:11:06 +0900更新時刻: 2024-04-02 05:17:29 +0900
