Characterization of Metal/High-k Structures Using Monoenergetic Positron Beams

Akira Uedono; Tatsuya Naito; Takashi Otsuka; Kenichi Ito; Kenji Shiraishi; Kikuo Yamabe; Seiichi Miyazaki; Heiji Watanabe; Naoto Umezawa; Toyohiro Chikyow; Toshiyuki Ohdaira; Ryoichi Suzuki; Yasushi Akasaka; Satoshi Kamiyama; Yasuo Nara; Keisaku Yamada; Akira Uedono; Tatsuya Naito; Takashi Otsuka; Kenichi Ito; Kenji Shiraishi; Kikuo Yamabe; Seiichi Miyazaki; Heiji Watanabe; Naoto Umezawa; Toyohiro Chikyow; Toshiyuki Ohdaira; Ryoichi Suzuki; Yasushi Akasaka; Satoshi Kamiyama; Yasuo Nara; Keisaku Yamada

doi:10.1143/jjap.46.3214

Characterization of Metal/High-k Structures Using Monoenergetic Positron Beams

Akira Uedono, Tatsuya Naito, Takashi Otsuka, Kenichi Ito, Kenji Shiraishi, Kikuo Yamabe, Seiichi Miyazaki, Heiji Watanabe, Naoto Umezawa, Toyohiro Chikyow, Toshiyuki Ohdaira, Ryoichi Suzuki, Yasushi Akasaka, Satoshi Kamiyama, Yasuo Nara, Keisaku Yamada.

Japanese Journal of Applied Physics 46 [5B] 3214-3218. 2007.

https://doi.org/10.1143/jjap.46.3214

NIMS author(s)

CHIKYO, Toyohiro

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 15:25:45 +0900Updated at: 2024-03-31 10:32:14 +0900