HOME > 論文 > 書誌詳細High-resolution and nondestructive profile measurement by spectral-domain optical coherence tomography with a visible broadband light source for optical-device fabrication(可視光OCTによる半導体光デバイス微細加工における高分解・非破壊膜厚測定法)Tsuyoshi Nishi, Nobuhiko Ozaki, Yoichi Oikawa, Kunio Miyaji, Hirotaka Ohsato, Eiichiro Watanabe, Naoki Ikeda, Yoshimasa Sugimoto. Japanese Journal of Applied Physics 55 [8S3] 08RE05. 2016.https://doi.org/10.7567/jjap.55.08re05 NIMS著者渡辺 英一郎池田 直樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-10-26 15:41:42 +0900更新時刻: 2024-04-01 22:16:17 +0900