High-resolution and nondestructive profile measurement by spectral-domain optical coherence tomography with a visible broadband light source for optical-device fabrication
(可視光OCTによる半導体光デバイス微細加工における高分解・非破壊膜厚測定法)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-10-26 15:41:42 +0900 Updated at: 2026-11-04 04:55:11 +0900