HOME > Article > DetailEffects of Ion Beam Irradiation on The Crystallization of Si-C FilmsHISHITA, Shunichi, OYOSHI, Keiji, SUEHARA, Shigeru, AIZAWA, Takashi. Nuclear Instr. And Methods in Physics Research,B . 1998.NIMS author(s)OYOSHI, KeijiSUEHARA, ShigeruAIZAWA, TakashiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 10:52:54 +0900 Updated at: 2022-09-05 10:52:54 +0900
