SAMURAI - NIMS Researchers Database

HOME > 論文 > 書誌詳細

Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen

Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase.
Journal of Vacuum Science & Technology A 37 [2] 021601. 2019.
https://doi.org/10.1116/1.5074160
Open Access American Vacuum Society (Publisher)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

    作成時刻: 2019-06-21 03:00:19 +0900更新時刻: 2024-03-31 01:20:46 +0900

    ▲ページトップへ移動