Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen

Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase.

Journal of Vacuum Science & Technology A 37 [2] 021601. 2019.

https://doi.org/10.1116/1.5074160

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橋本綾子

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2019-06-21 03:00:19 +0900 更新時刻: 2026-09-29 05:24:10 +0900

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