Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen

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Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase.

Open Access American Vacuum Society (Publisher)

作成時刻: 2019-06-21 03:00:19 +0900更新時刻: 2024-10-06 05:31:28 +0900