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Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen

Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase.
Journal of Vacuum Science & Technology A 37 [2] 021601. 2019.
https://doi.org/10.1116/1.5074160
Open Access American Vacuum Society (Publisher)

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    Created at: 2019-06-21 03:00:19 +0900Updated at: 2024-05-01 05:03:22 +0900

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