Evaluation of sensor property for hydrogen and ethanol of zinc-doped tin-dioxide thin films fabricated by rf sputtering | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Evaluation of sensor property for hydrogen and ethanol of zinc-doped tin-dioxide thin films fabricated by rf sputtering
(RFスパッタリング法による亜鉛添加酸化スズ薄膜の水素、エタノールガスセンサ特性評価)

Isao SAKAGUCHI, Noriko SAITO, Ken WATANABE, Yutaka ADACHI, Taku T. SUZUKI.

Journal of the Ceramic Society of Japan 124 [6] 714-716. 2016.

https://doi.org/10.2109/jcersj2.16015

Open Access Ceramic Society of Japan (Publisher)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-07-17 02:28:46 +0900更新時刻: 2024-04-02 06:36:17 +0900

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