Evaluation of sensor property for hydrogen and ethanol of zinc-doped tin-dioxide thin films fabricated by rf sputtering
(RFスパッタリング法による亜鉛添加酸化スズ薄膜の水素、エタノールガスセンサ特性評価)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-07-17 02:28:46 +0900 Updated at: 2026-10-08 08:09:10 +0900