RFスパッタ法で成膜したBaCe0.85Ru0.05Y0.10O3－δ薄膜の電気・構造特性

Masanori Ochi; Takashi Tsuchiya; Shohei Yamaguchi; Takaaki Suetsugu; Naoya Suzuki; Masaki Kobayashi; Makoto Minohara; Koji Horiba; Hiroshi Kumigashira; Tohru Higuchi

doi:10.7567/jjap.55.06gj02

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Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering
(RFスパッタ法で成膜したBaCe0.85Ru0.05Y0.10O3－δ薄膜の電気・構造特性)

Masanori Ochi, Takashi Tsuchiya, Shohei Yamaguchi, Takaaki Suetsugu, Naoya Suzuki, Masaki Kobayashi, Makoto Minohara, Koji Horiba, Hiroshi Kumigashira, Tohru Higuchi.

Japanese Journal of Applied Physics 55 [6S1] 06GJ02. 2016.

https://doi.org/10.7567/jjap.55.06gj02

NIMS著者

土屋敬志

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-10-26 15:43:44 +0900更新時刻: 2024-04-01 23:28:57 +0900

Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering(RFスパッタ法で成膜したBaCe0.85Ru0.05Y0.10O3－δ薄膜の電気・構造特性)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering
(RFスパッタ法で成膜したBaCe0.85Ru0.05Y0.10O3－δ薄膜の電気・構造特性)