Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering

Masanori Ochi; Takashi Tsuchiya; Shohei Yamaguchi; Takaaki Suetsugu; Naoya Suzuki; Masaki Kobayashi; Makoto Minohara; Koji Horiba; Hiroshi Kumigashira; Tohru Higuchi; Masanori Ochi; Takashi Tsuchiya; Shohei Yamaguchi; Takaaki Suetsugu; Naoya Suzuki; Masaki Kobayashi; Makoto Minohara; Koji Horiba; Hiroshi Kumigashira; Tohru Higuchi

doi:10.7567/jjap.55.06gj02

Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering
(RFスパッタ法で成膜したBaCe0.85Ru0.05Y0.10O3－δ薄膜の電気・構造特性)

Masanori Ochi, Takashi Tsuchiya, Shohei Yamaguchi, Takaaki Suetsugu, Naoya Suzuki, Masaki Kobayashi, Makoto Minohara, Koji Horiba, Hiroshi Kumigashira, Tohru Higuchi.

Japanese Journal of Applied Physics 55 [6S1] 06GJ02. 2016.

https://doi.org/10.7567/jjap.55.06gj02

NIMS author(s)

TSUCHIYA, Takashi

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-10-26 15:43:44 +0900Updated at: 2024-04-01 23:28:57 +0900

Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering(RFスパッタ法で成膜したBaCe0.85Ru0.05Y0.10O3－δ薄膜の電気・構造特性)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering
(RFスパッタ法で成膜したBaCe0.85Ru0.05Y0.10O3－δ薄膜の電気・構造特性)