Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy
Author(s) | Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, Mitsuru Okigawa, Takashi Shinohe. |
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Journal title | Japanese Journal of Applied Physics 59 [2] 025512 ISSN: 13474065, 00214922 ESI category: PHYSICS |
Publisher | IOP Publishing |
Year of publication | 2020 |
Language | English |
DOI | https://doi.org/10.35848/1347-4065/ab6faf |
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