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Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy

Author(s)Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, Mitsuru Okigawa, Takashi Shinohe.
Journal titleJapanese Journal of Applied Physics 59 [2] 025512
ISSN: 13474065, 00214922
ESI category: PHYSICS
PublisherIOP Publishing
Year of publication2020
LanguageEnglish
DOIhttps://doi.org/10.35848/1347-4065/ab6faf
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