HOME > Article > Detailコンビナトリアルスパッタ成膜装置とZnO膜の摩擦特性制御(Combinatorial Sputter Coating System and Frictional Property Control of ZnO Coating Films)後藤 真宏, 笠原 章, 土佐 正弘. Journal of the Vacuum Society of Japan 54 [11] 565-570. 2011.https://doi.org/10.3131/jvsj2.54.565 NIMS author(s)GOTO, MasahiroKASAHARA, AkiraTOSA, MasahiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:27:13 +0900Updated at: 2024-04-02 06:25:09 +0900