コンビナトリアルスパッタ成膜装置とZnO膜の摩擦特性制御
(Combinatorial Sputter Coating System and Frictional Property Control of ZnO Coating Films)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 16:27:13 +0900 Updated at: 2026-10-08 07:59:23 +0900