Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C

Tetsuya Miyazawa; Masashi Kurihara; Shinya Ohno; Naoya Terashima; Yuto Natsui; Hiroo Kato; Yoshihiro Kato; Ayako Hashimoto; Takashi Kikuchi; Kazuhiko Mase

doi:10.1116/1.5037023

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Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C

Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase.

Journal of Vacuum Science & Technology A 36 [5] 051601. 2018.

https://doi.org/10.1116/1.5037023

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橋本綾子

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2018-09-01 15:14:03 +0900更新時刻: 2024-10-05 05:19:15 +0900