Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C

Tetsuya Miyazawa; Masashi Kurihara; Shinya Ohno; Naoya Terashima; Yuto Natsui; Hiroo Kato; Yoshihiro Kato; Ayako Hashimoto; Takashi Kikuchi; Kazuhiko Mase; Tetsuya Miyazawa; Masashi Kurihara; Shinya Ohno; Naoya Terashima; Yuto Natsui; Hiroo Kato; Yoshihiro Kato; Ayako Hashimoto; Takashi Kikuchi; Kazuhiko Mase

doi:10.1116/1.5037023

Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C

Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase.

Journal of Vacuum Science & Technology A 36 [5] 051601. 2018.

https://doi.org/10.1116/1.5037023

NIMS author(s)

HASHIMOTO, Ayako

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2018-09-01 15:14:03 +0900 Updated at: 2025-06-13 05:09:12 +0900