窒化物(TiZrAlYNb)Nの構造・組成・諸性質に及ぼす残留圧力とイオン注入の影響

A. D. Pogrebnjak; I. V. Yakushchenko; O. V. Sobol’; V. M. Beresnev; A. I. Kupchishin; O. V. Bondar; M. A. Lisovenko; H. Amekura; K. Kono; K. Oyoshi; Y. Takeda

doi:10.1134/s1063784215080228

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Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides
(窒化物(TiZrAlYNb)Nの構造・組成・諸性質に及ぼす残留圧力とイオン注入の影響)

A. D. Pogrebnjak, I. V. Yakushchenko, O. V. Sobol’, V. M. Beresnev, A. I. Kupchishin, O. V. Bondar, M. A. Lisovenko, H. Amekura, K. Kono, K. Oyoshi, Y. Takeda.

Technical Physics 60 [8] 1176-1183. 2015.

https://doi.org/10.1134/s1063784215080228

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-05-24 17:57:56 +0900更新時刻: 2024-03-30 02:05:56 +0900

Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides(窒化物(TiZrAlYNb)Nの構造・組成・諸性質に及ぼす残留圧力とイオン注入の影響)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides
(窒化物(TiZrAlYNb)Nの構造・組成・諸性質に及ぼす残留圧力とイオン注入の影響)